particle & dust
- 인체에 침투가능한 먼지크기
- 코 : 5 ~ 10 ㎍/m3
- 목 : 2 ~ 5㎍/m3
- 기관지 : 1 ~ 2㎍/m3
- 폐 : 0.1 ~ 1㎍/m3
| ISO 3-4 (Class I-10) |
ISO 5 (Class 100) |
ISO 6 (Class 1,000) |
ISO 7 (Class 10,000) |
ISO 8 (Class 100,000) |
|
|---|---|---|---|---|---|
| SLCON CRYSTALLIZATION | |||||
| WAFER MANUFACTURE | |||||
| DIFFUSON | |||||
| WAFER PROCESSING | |||||
| PHOTOTHOGRAPHY | |||||
| IC CHIP MANUFACTURE | |||||
| ASSEMBLY | |||||
| INSPECTION | |||||
| SMT | |||||
| SURFACE CLEANING |
| ISO 3-4 (Class I-10) |
ISO 5 (Class 100) |
ISO 6 (Class 1,000) |
ISO 7 (Class 10,000) |
ISO 8 (Class 100,000) |
|
|---|---|---|---|---|---|
| PHOTOTHOGRAPHY | |||||
| COLOR FILTER | |||||
| ASSEMBLY |
